Ultra-high vacuum research and industrial platforms since 1996. End-to-end solutions for thin film growth, analysis, and sample transfer
Deposition Systems
Advanced deposition platforms for synthesizing new materials and applying thin film layers. Multiple growth techniques within a single UHV platform.
- MBE, PLD, RHEED, CVD / PECVD
- HIPIMS, magnetron sputtering, thermal evaporation
- Ion milling, spin coating
- 300 / 450 / 600 mm growth chamber options
Manipulators
Precision manipulators that bring the sample to your exact required position, temperature, and angle.From cryogenic cooling to heating up to 2000 °C.
- 1–5 axis universal manipulators
- LN2 cooling (down to 90 K) / LHe cooling (down to 5 K)
- Resistive 1000 °C, EB 2000 °C, direct heating
- Multi-holder station, continuous 60 rpm rotation
Accessories
PREVAC-designed and manufactured instruments that enhance your existing system or complement your new platform.
- Magnetron guns, e-beam evaporators
- Effusion cells (low temperature / dual zone)
- Pressure gauges, thickness monitors, quartz balances
- MFC, substrate heater, beam flux monitor
Power Supplies
PREVAC electronics for magnetron, heater, X-ray, UV, ion, and electron sources. PID-controlled, compliant with global standards.
- DC and Pulsed DC magnetron power supplies
- DC/RF switching module — 4 to 12 source outputs
- Heating power supplies, emission controllers
- Bakeout control units, stepper motor drivers
