Vacuum Systems

Our company designs and manufactures purpose-built R&D and P&D (Product Development) scale vacuum systems and components, specifically for the advanced thin film coatings whose production technologies we develop.

Hybrid-SpEv

A thin film coating system equipped with sputtering and thermal evaporation sources.

Large Area Coating System

•Custom-designed for R&D scalable to P&D (Product Development) 

•Vacuum components

•Multi-layer film coating (40cm x 40cm) using 8 (eight) 2-inch sources.

•Surface cleaning via an Ar or O2 plasma cleaning chamber.

Vacuum System Components

Circular Magnetron Sputter Sources

Substrate Heaters

Thermal Evaporation Sources

Industrial Scale Linear Sputter Source

40 cm x 10 cm Target Area